Phifer Smith Corporation
Web Address: www.phifersmith.com
Categories: Marketing, Product Development & Marketing
Process technology IP and key process hardware components for enabling high performance single-substrate wet-cleaning and surface-treatment
Keywords: device, manufacturing, single-wafer, substrate, wet, processing, cleaning, post-etch, photoresist removal, residue removal, post-CMP, SiCOH, low-k, dielectric, copper-passivation, surface, treatment
Keywords: device, manufacturing, single-wafer, substrate, wet, processing, cleaning, post-etch, photoresist removal, residue removal, post-CMP, SiCOH, low-k, dielectric, copper-passivation, surface, treatment
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